| CPC H10F 39/811 (2025.01) [H10F 39/182 (2025.01); H10F 39/199 (2025.01); H10F 39/8023 (2025.01); H10F 39/8037 (2025.01); H10F 39/809 (2025.01)] | 9 Claims |
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1. A light detecting device, comprising:
a first substrate that includes:
a first semiconductor substrate; and
a first multi-layered wiring layer on the first semiconductor substrate;
a second substrate that includes:
a second semiconductor substrate; and
a second multi-layered wiring layer on the second semiconductor substrate;
a third substrate that includes:
a third semiconductor substrate; and
a third multi-layered wiring layer on the third semiconductor substrate;
an electrode pad above the first multi-layered wiring layer;
an opening that passes through the second semiconductor substrate; and
an electrically conductive film arranged on a side wall of the opening, wherein
the first substrate, the second substrate, and the third substrate are stacked in this order,
the electrode pad and a wiring in the second multi-layered wiring layer are electrically connected via the electrically conductive film, and
the opening exposes the wiring in the second multi-layered wiring layer.
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