| CPC H10F 30/225 (2025.01) [H10F 39/18 (2025.01); H10F 39/8027 (2025.01); H10F 39/8033 (2025.01); H10F 39/8037 (2025.01); H10F 39/807 (2025.01)] | 22 Claims |

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1. A device, comprising:
a first semiconductor layer having a first conductivity type;
a second semiconductor layer on the first semiconductor layer and having a second conductivity type;
a first semiconductor wall extending through the first semiconductor layer and the second semiconductor layer;
a second semiconductor wall extending through the first semiconductor layer and the second semiconductor layer;
an insulating trench extending into the second semiconductor layer, the insulating trench in direct physical contact with the first semiconductor wall; and
a semiconductor region extending into the second semiconductor layer, spaced from the first semiconductor wall by the insulating trench, and having the second conductivity type, the first semiconductor wall being spaced from the second semiconductor wall by the insulating trench and the semiconductor region.
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