US 12,334,910 B2
Surface acoustic wave resonator with asymmetric reflectors
Tomoya Komatsu, Irvine, CA (US); and Yiliu Wang, Irvine, CA (US)
Assigned to Skyworks Solutions, Inc., Irvine, CA (US)
Filed by Skyworks Solutions, Inc., Irvine, CA (US)
Filed on May 12, 2022, as Appl. No. 17/743,013.
Claims priority of provisional application 63/218,678, filed on Jul. 6, 2021.
Claims priority of provisional application 63/218,848, filed on Jul. 6, 2021.
Claims priority of provisional application 63/218,682, filed on Jul. 6, 2021.
Prior Publication US 2023/0010291 A1, Jan. 12, 2023
Int. Cl. H03H 9/64 (2006.01); H03H 9/02 (2006.01); H03H 9/145 (2006.01); H03H 9/25 (2006.01); H04B 1/12 (2006.01); H04B 1/40 (2015.01)
CPC H03H 9/6483 (2013.01) [H03H 9/02637 (2013.01); H03H 9/02842 (2013.01); H03H 9/145 (2013.01); H03H 9/14582 (2013.01); H03H 9/25 (2013.01); H04B 1/12 (2013.01); H04B 1/40 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An acoustic wave filter comprising:
at least a first acoustic wave resonator including a first interdigital transducer electrode over a piezoelectric layer, the first interdigital transducer electrode including fingers having a first pitch with a first temperature compensation layer over the first interdigital transducer electrode, a first set of reflectors over the piezoelectric layer, the first set of reflectors including a first number of reflectors having a second pitch, the first pitch being greater than the second pitch, a second set of reflectors over the piezoelectric layer that is asymmetric with respect to the first set of reflectors, the second set of reflectors including a second number of reflectors having a third pitch, the first pitch being greater than the third pitch, the second number of reflectors being less than the first number of reflectors to obtain additional notches in a frequency response; and
at least a second acoustic wave resonator in communication with the first acoustic wave resonator, the second acoustic wave resonator including a second interdigital transducer electrode over the piezoelectric layer, the second interdigital transducer electrode including fingers having a fourth pitch with a second temperature compensation layer over the second interdigital transducer electrode, the second temperature compensation layer is thicker than the first temperature compensation layer.