US 12,334,905 B2
Acoustic resonator
Hoan Jun Choi, Gyeonggi-do (KR); Tah Joon Park, Gyeonggi-do (KR); Byung Hun Kim, Gyeonggi-do (KR); and Jong Hyeon Park, Gyeonggi-do (KR)
Assigned to WISOL CO., LTD., Gyeonggi-do (KR)
Filed by WISOL CO., LTD., Gyeonggi-do (KR)
Filed on Jun. 30, 2022, as Appl. No. 17/854,116.
Claims priority of application No. 10-2021-0086243 (KR), filed on Jul. 1, 2021.
Prior Publication US 2023/0006643 A1, Jan. 5, 2023
Int. Cl. H03H 9/17 (2006.01); H03H 9/02 (2006.01)
CPC H03H 9/172 (2013.01) [H03H 9/02015 (2013.01)] 7 Claims
OG exemplary drawing
 
1. An acoustic resonator comprising:
a substrate comprising a first cavity;
a first electrode formed above the substrate;
a piezoelectric layer formed on one surface of the first electrode; and
a second electrode formed on one surface of the piezoelectric layer,
wherein the piezoelectric layer includes a longitudinal section that does not contact a longitudinal section of the first electrode,
wherein a first interpolar cavity extends at least partially between the longitudinal section of the first electrode and the longitudinal section of the piezoelectric layer,
wherein the piezoelectric layer includes an end face extending from the one surface of the piezoelectric layer, the end face partially defines the longitudinal section of the piezoelectric layer, and the end face is spaced apart from the longitudinal section of the first electrode via the first interpolar cavity,
wherein the second electrode contacts the longitudinal section of the piezoelectric layer, and extends to and contacts the first interpolar cavity which spaces the first electrode at least partially apart from the piezoelectric layer, and
wherein the piezoelectric layer is formed to be longitudinally cut at a position that does not contact the longitudinal section of the first electrode.