US 12,334,902 B2
Acoustic wave device with transverse mode suppression
Rei Goto, Osaka (JP); Koji Seo, Kyotanabe (JP); and Keiichi Maki, Suita (JP)
Assigned to Skyworks Solutions, Inc., Irvine, CA (US)
Filed by Skyworks Solutions, Inc., Irvine, CA (US)
Filed on May 25, 2022, as Appl. No. 17/824,800.
Application 17/824,800 is a continuation of application No. 16/723,990, filed on Dec. 20, 2019, granted, now 11,368,137.
Claims priority of provisional application 62/785,919, filed on Dec. 28, 2018.
Prior Publication US 2022/0286105 A1, Sep. 8, 2022
Int. Cl. H03H 9/02 (2006.01); H03H 9/145 (2006.01); H03H 9/25 (2006.01); H03H 9/64 (2006.01)
CPC H03H 9/02889 (2013.01) [H03H 9/02834 (2013.01); H03H 9/145 (2013.01); H03H 9/25 (2013.01); H03H 9/6483 (2013.01); H03H 9/6489 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An acoustic wave device comprising a multi-layer mass loading strip at least partially overlapping edge portions of a plurality of fingers of an interdigital transducer electrode, the multi-layer mass loading strip having a mass sufficient to suppress at least a portion of a transverse mode, the multi-layer mass loading strip including a first layer and a second layer, the first layer of the multi-layer mass loading strip positioned between the second layer of the multi-layer mass loading strip and the interdigital transducer electrode, and the first layer improves crystal orientation of the second layer.