US 12,334,715 B2
Visible light source including integrated VCSELs and integrated photonic cavities
Zhimin Shi, Bellevue, WA (US); Maik Andre Scheller, Redmond, WA (US); Gareth Valentine, Kirkland, WA (US); and James Ronald Bonar, Redmond, WA (US)
Assigned to Meta Platforms Technologies, LLC, Menlo Park, CA (US)
Filed by Meta Platforms Technologies, LLC, Menlo Park, CA (US)
Filed on Jun. 10, 2021, as Appl. No. 17/344,738.
Claims priority of provisional application 63/179,913, filed on Apr. 26, 2021.
Prior Publication US 2022/0344907 A1, Oct. 27, 2022
Int. Cl. H01S 5/42 (2006.01); G02F 1/35 (2006.01); G02F 1/39 (2006.01); H01S 3/108 (2006.01); H01S 5/00 (2006.01); H01S 5/026 (2006.01); H01S 5/04 (2006.01); H01S 5/11 (2021.01); H01S 5/14 (2006.01); H01S 5/183 (2006.01); H01S 5/50 (2006.01); H04B 10/116 (2013.01)
CPC H01S 5/423 (2013.01) [G02F 1/3536 (2013.01); G02F 1/39 (2013.01); H01S 3/1083 (2013.01); H01S 5/0064 (2013.01); H01S 5/0261 (2013.01); H01S 5/041 (2013.01); H01S 5/11 (2021.01); H01S 5/141 (2013.01); H01S 5/142 (2013.01); H01S 5/18355 (2013.01); H01S 5/18377 (2013.01); H01S 5/5054 (2013.01); H04B 10/116 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A visible light source comprising:
a substrate;
a first reflector and a second reflector on the substrate, wherein the first reflector and the second reflector are configured to reflect infrared light and are arranged to form a cavity in a direction perpendicular to the substrate;
an active region in the cavity, the active region configured to emit infrared light;
a micro-resonator in a layer above the active region in the direction perpendicular to the substrate, the micro-resonator including a resonator that is formed using a nonlinear material and is configured to receive the infrared light emitted by the active region and generate visible light through optical parametric oscillation in the resonator; and
an output coupler configured to couple the visible light generated in the micro-resonator out of the micro-resonator.