US 12,334,700 B2
Wavelength conversion apparatus, solid-state laser system, and electronic device manufacturing method
Yohei Tanaka, Oyama (JP); Chen Qu, Oyama (JP); and Atsushi Fuchimukai, Oyama (JP)
Assigned to Gigaphoton Inc., Tochigi (JP)
Filed by Gigaphoton Inc., Tochigi (JP)
Filed on Feb. 7, 2022, as Appl. No. 17/666,471.
Application 17/666,471 is a continuation of application No. PCT/JP2019/036172, filed on Sep. 13, 2019.
Prior Publication US 2022/0158402 A1, May 19, 2022
Int. Cl. H01S 3/00 (2006.01); G02F 1/35 (2006.01); G02F 1/37 (2006.01); H01S 3/109 (2006.01); G03F 7/00 (2006.01); H01S 3/225 (2006.01)
CPC H01S 3/0092 (2013.01) [G02F 1/3505 (2021.01); G02F 1/3548 (2021.01); G02F 1/37 (2013.01); H01S 3/109 (2013.01); G03F 7/70341 (2013.01); H01S 3/2251 (2013.01)] 25 Claims
OG exemplary drawing
 
1. A wavelength conversion apparatus that performs wavelength conversion of light through a non-linear crystal, the wavelength conversion apparatus comprising:
a first non-linear crystal;
a container in which the first non-linear crystal is housed;
a crystal holding member provided inside the container and configured to fix the first non-linear crystal;
a first window provided to the container and configured to guide light from outside of the container to the first non-linear crystal;
a second window provided to the container and configured to guide light output from the first non-linear crystal to outside of the container;
a first heater provided inside the container and configured to heat the first non-linear crystal;
a battery configured to supply electric power to the first heater; and
a first controller configured to control electric power supply to the first heater, wherein
the first controller changes an electric power supply amount in accordance with an electrical storage amount of the battery.