	US 12,334,381 B2
	Guide unit, transfer assembly and die bonding apparatus including the same
Do-Youn Lim, Hwaseong-si (KR); Yeon Hyuk Jung, Cheonan-si (KR); Eung Seok Kim, Cheonan-si (KR); and Byoung Ho Jung, Cheonan-si (KR)
Assigned to SEMES CO., LTD., Cheonan-si (KR)
Filed by SEMES CO., LTD., Cheonan-si (KR)
Filed on Jun. 13, 2022, as Appl. No. 17/838,333.
Claims priority of application No. 10-2021-0076566 (KR), filed on Jun. 14, 2021.
Prior Publication US 2022/0399221 A1, Dec. 15, 2022
Int. Cl. H01L 21/677 (2006.01); H01L 21/67 (2006.01); H01L 21/68 (2006.01); H01L 21/687 (2006.01)

CPC H01L 21/67766 (2013.01) [H01L 21/67144 (2013.01); H01L 21/68 (2013.01); H01L 21/68707 (2013.01)]

8 Claims

1. A transfer assembly for transferring a transfer object stored at a cassette to a target position, the transfer assembly comprising:

a transfer robot configured to take out the transfer object stored at the cassette and to transfer in a first direction to the target position; and

a guide unit providing a transfer passage for transferring the transfer object, and

wherein the guide unit comprises:

a first guide member provided with its lengthwise direction in the first direction; and

a second guide member provided with its lengthwise direction in the first direction, and spaced apart from the first guide member in a second direction perpendicular to the first direction, the first guide member and the second guide member defining the transfer passage therebetween, and

wherein at least a portion of the first guide member is movable such that a width of the transfer passage is changeable by the movement of the at least a portion of the first guide member;

wherein the first guide member comprises:

a fixed body; and

a moving body hinged to the fixed body, the moving body being the at least a portion of the first guide member and being movable by a physical contact with the transfer object and

wherein the moving body is rotatably movable with respect to the fixed body around an axis of a hinge;

wherein the moving body is hinged to the fixed body at a position in which a first end of the moving body and a first end of the fixed body overlap, and

the moving body moves in a direction away from the transfer object with respect to an axis of the first direction by the physical contact with the transfer object;

wherein a second end of the moving body and a second end of the fixed body is coupled by an elastic member, and

the moving body moved by the physical contact with the transfer object reverts back to an original position by a restoring force of the elastic member;

wherein the moving body further comprises:

a plurality of holes formed at the second end of the moving body and arranged in a row in the first direction; and

a pin member selectively coupled to any one hole of the plurality of holes, and

wherein a first end of the elastic member is fixed to the pin member of the moving body, and a second end of the elastic member is fixed to the fixed body.