US 12,334,377 B2
Chiplet loader for microassembler
JengPing Lu, Fremont, CA (US); David K. Biegelsen, Portola Valley, CA (US); Sourobh Raychaudhuri, Mountain View, CA (US); Bradley Rupp, Palo Alto, CA (US); and Eugene M. Chow, Palo Alto, CA (US)
Assigned to Xerox Corporation, Norwalk, CT (US)
Filed by PALO ALTO RESEARCH CENTER INCORPORATED, Palo Alto, CA (US)
Filed on Jan. 17, 2023, as Appl. No. 18/097,543.
Prior Publication US 2024/0242993 A1, Jul. 18, 2024
Int. Cl. H01L 21/677 (2006.01)
CPC H01L 21/67721 (2013.01) [H01L 21/67736 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A system comprising:
a reservoir storing a supply of chiplets suspended in a suspension fluid, each of the chiplets comprising a bottom major surface that defines a right side down orientation;
a delivery surface forming a path to deliver the chiplets from the reservoir to an assembly surface;
a sensor that identifies a first subset of the chiplets having the respective bottom surfaces facing the assembly surface; and
a micro assembler that arranges the first subset of the chiplets in a pattern on the assembly surface and moves the first subset of chiplets towards a subsequent assembly stage, the micro assembler comprising an array of field generators fixed relative to the assembly surface that move the first subset of the chiplets along the assembly surface in response to signals applied to each of the field generators.