US 12,334,371 B2
Remote monitoring apparatus for air valve for semiconductor equipment
Sang Hyub Lee, Cheonan-si (KR)
Assigned to SPSGLOBAL Co., Ltd, Cheonan-si (KR)
Filed by SPSGLOBAL Co., Ltd, Cheonan-si (KR)
Filed on Nov. 4, 2021, as Appl. No. 17/518,917.
Prior Publication US 2023/0126604 A1, Apr. 27, 2023
Int. Cl. H01L 21/67 (2006.01); G01M 3/24 (2006.01); G01M 3/26 (2006.01); G01M 3/38 (2006.01); G06N 20/00 (2019.01)
CPC H01L 21/67242 (2013.01) [G01M 3/24 (2013.01); G01M 3/26 (2013.01); G01M 3/38 (2013.01); G06N 20/00 (2019.01)] 8 Claims
OG exemplary drawing
 
1. A remote monitoring apparatus for an air valve for semiconductor equipment, the remote monitoring apparatus comprising:
a communication network formed by selecting one or more from an Internet, a Bluetooth network, a Wi-Fi network, and an Internet of Things (IoT) network and then combining them, and configured to connect a device, a server, and a terminal;
an inspection device installed on one side of an air valve for semiconductor equipment;
a management server connected to the communication network, and configured to collectively manage failure diagnosis and monitoring information; and
an operator terminal configured to output the failure diagnosis and monitoring information,
wherein the inspection device comprises:
an inspection device body installed on one side of the air valve;
a sensor unit installed on one side of the inspection device body, and configured to sense audio data, pressure data, image data, displacement data, infrared data, and ultrasonic data of the air valve; and
a microcontroller unit (MCU) installed inside the inspection device body.