US 12,334,364 B2
Systems and methods for controlling precursor delivery
Michael Watson, Leander, TX (US); Christopher Calhoun, Burnet, TX (US); Cristian Ocampo, Cedar Park, TX (US); Scott L. Battle, Cedar Park, TX (US); Benjamin Cardozo, Burnet, TX (US); and Benjamin R. Garrett, Leander, TX (US)
Assigned to ENTEGRIS, INC., Billerica, MA (US)
Filed by ENTEGRIS, INC., Billerica, MA (US)
Filed on Mar. 20, 2023, as Appl. No. 18/123,447.
Claims priority of provisional application 63/322,195, filed on Mar. 21, 2022.
Prior Publication US 2023/0298909 A1, Sep. 21, 2023
Int. Cl. H01L 21/67 (2006.01); C23C 16/08 (2006.01); C23C 16/448 (2006.01); C23C 16/455 (2006.01)
CPC H01L 21/67017 (2013.01) [C23C 16/08 (2013.01); C23C 16/448 (2013.01); C23C 16/45561 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A method comprising:
obtaining a precursor delivery vessel containing a vaporizable precursor on at least one tray,
wherein the at least one tray comprises a material having a thermal conductivity of greater than 15 W m−1 K−1;
supplying an amount of thermal energy to the at least one tray sufficient to vaporize the vaporizable precursor;
dispensing the vaporized precursor from the precursor delivery vessel to a gas flow line; and
adjusting the amount of thermal energy supplied to the at least one tray sufficient to maintain a pressure of the vaporized precursor, in the gas flow line, within a pressure range.