US 12,334,363 B2
Purge controlling system
Chen-Wei Ku, Miaoli County (TW); Han-Cheng Hu, Miaoli County (TW); and Min-Che Li, Miaoli County (TW)
Assigned to BRILLIAN NETWORK & AUTOMATION INTEGRATED SYSTEM CO., LTD., Miaoli County (TW)
Filed by Brillian Network & Automation Integrated System Co., Ltd., Miaoli County (TW)
Filed on Aug. 10, 2022, as Appl. No. 17/885,346.
Claims priority of application No. 110131008 (TW), filed on Aug. 23, 2021; and application No. 111111308 (TW), filed on Mar. 25, 2022.
Prior Publication US 2023/0054047 A1, Feb. 23, 2023
Int. Cl. H01L 21/67 (2006.01); F24F 9/00 (2006.01); H01L 21/677 (2006.01); C23C 16/44 (2006.01)
CPC H01L 21/67017 (2013.01) [F24F 9/00 (2013.01); H01L 21/67126 (2013.01); H01L 21/67772 (2013.01); C23C 16/4408 (2013.01); F24F 2009/005 (2013.01); H01L 21/67775 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A purge controlling system connected with a load port for loading a wafer cassette, wherein a door assembly of the load port is used to open the door body of the wafer cassette, the purge controlling system comprising a purge module and a control module, wherein
the purge module arranged in the load port comprising:
an air curtain unit arranged above the door assembly of the load port to output a gas curtain towards the opening side of the wafer cassette, wherein the air curtain unit comprises: a main body, an upper end and/or one side of the main body including at least a gas inlet which communicated with a pipeline in the purge module, so that a purge gas from a gas supply device entering the main body through the pipeline and the gas inlet; and a ventilation plate arranged in the main body, the ventilation plate including a plurality of vents provided for discharging the purge gas out of the main body to form the gas curtain between the air curtain unit and the door assembly of the load port;
a sensing unit arranged on the load port, wherein the sensing unit detects a displacement value of the door assembly of the load port and transmits a sensing signal corresponding to the displacement value of the door assembly to the control module; and
a flow control unit coupling to the air curtain unit and the control module respectively to control a gas flow of a purge gas entering into the air curtain unit according to the sensing signal; and
the control module electrically connected to the purge module, wherein the control module receives the sensing signal detected and transmitted from the sensing unit to regulate the flow control unit to control the air curtain unit to output a flow velocity of the gas curtain according to the displacement value of the door assembly; the flow velocity of the gas curtain increases when the displacement value of the door assembly increases; wherein when the door assembly moves to a first location point, the air curtain unit create the gas curtain with a first flow velocity, and when the door assembly moves to a second location point, the air curtain unit create the gas curtain with a second flow velocity, wherein when a second displacement value of the door assembly at the second location point is larger than a first displacement value of the door assembly at the first location point, the second flow velocity of the gas curtain is larger than the first flow velocity of the gas curtain, and when the second displacement value of the door assembly at the second location point is smaller than the first displacement value of the door assembly at the first location point, the second flow velocity is smaller than the first flow velocity.