US 12,334,348 B2
Substrate scanning apparatus with pendulum and rotatable substrate holder
Kevin Siefering, Excelsior, MN (US); Michael Gruenhagen, Norwood Young America, MN (US); and Matthew Gwinn, Winchendon, MA (US)
Assigned to TEL MANUFACTURING AND ENGINEERING OF AMERICA, INC., Chaska, MN (US)
Filed by TEL Manufacturing and Engineering of America, Inc., Chaska, MN (US)
Filed on Jul. 21, 2021, as Appl. No. 17/381,743.
Prior Publication US 2023/0021625 A1, Jan. 26, 2023
Int. Cl. H01L 21/26 (2006.01)
CPC H01L 21/26 (2013.01) 20 Claims
OG exemplary drawing
 
10. An apparatus comprising:
a processing chamber;
a pendulum arm disposed in the processing chamber and comprising a proximal end and a distal end, the proximal end being coupled to a first rotary drive configured to move the pendulum arm in an arc motion centered at the proximal end;
a substrate holder disposed in the processing chamber and coupled to a second rotary drive at a pivot point that is offset from the center of the substrate holder in a first direction by an offset distance that is less than the outer radius of the substrate holder, the second rotary drive being mounted at the distal end of the pendulum arm and being configured to rotate the substrate holder about the pivot point synchronously with the arc motion of the pendulum arm to move the substrate holder laterally relative to a location-specific processing apparatus; and
an actuator coupled to the pivot point, the actuator configured to shift the pivot point by translating a substrate relative to the pivot point.