US 12,334,341 B2
Chamber body feedthrough for in chamber resistive heating element
Brian Hayes Burrows, San Jose, CA (US); Ala Moradian, Sunnyvale, CA (US); Zuoming Zhu, Sunnyvale, CA (US); and Chia Cheng Chin, Fremont, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jan. 20, 2022, as Appl. No. 17/579,762.
Claims priority of provisional application 63/148,273, filed on Feb. 11, 2021.
Prior Publication US 2022/0254634 A1, Aug. 11, 2022
Int. Cl. H01L 21/02 (2006.01); C23C 16/458 (2006.01); H01L 21/67 (2006.01)
CPC H01L 21/02658 (2013.01) [C23C 16/4586 (2013.01); H01L 21/67103 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A heating system for substrate processing comprising:
a first heater comprising a continuous heating coil;
a first heater rod coupled to a first connection point of the first heater;
a second heater rod coupled to a second connection point of the first heater, wherein each of the first heater rod and the second heater rod are configured to be screwed onto the first heater and comprise a passage disposed therethrough;
a socket coupled to one of the first heater rod or the second heater rod at a distal end opposite the first heater, the socket comprising:
a feedthrough coupled to the first heater rod or the second heater rod and comprising a feedthrough inert gas passage fluidly coupled to the passage disposed through the first heater rod or the second heater rod; and
a cooling plate disposed around at least a portion of the feedthrough.