US 12,334,315 B2
Cooled substrate support assembly for radio frequency environments
Vijay D. Parkhe, San Jose, CA (US); Andreas Schmid, Meyriez (CH); Andrew Antoine Noujaim, Morgan Hill, CA (US); Stephen Donald Prouty, San Jose, CA (US); Alvaro Garcia De Gorordo, San Francisco, CA (US); and Martin Perez-Guzman, San Jose, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Apr. 30, 2020, as Appl. No. 16/863,719.
Prior Publication US 2021/0343512 A1, Nov. 4, 2021
Int. Cl. H01J 37/32 (2006.01); C23C 16/458 (2006.01); H01L 21/683 (2006.01); H01L 21/687 (2006.01)
CPC H01J 37/32724 (2013.01) [C23C 16/4586 (2013.01); H01L 21/68785 (2013.01); H01J 37/321 (2013.01); H01J 37/32577 (2013.01); H01L 21/6831 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A substrate support assembly comprising:
a body comprising:
an electrostatic chuck base assembly having channels configured to be fluidly coupled to a cryogenic chiller;
a facility plate disposed below the electrostatic chuck base assembly; and
a ground plate coupled a bottom surface of to the facility plate;
a tubular member having a fluid conduit disposed therethrough, the tubular member disposed through the facility plate and the ground plate and fluidly coupled to the electrostatic chuck base assembly, the tubular member having a first end guide and a spring seal disposed at a first end that extends beyond a bottom surface of the ground plate, the first end guide disposed around the tubular member and extending beyond the first end of the tubular member, and the tubular member having a second end guide disposed at a second end of the fluid conduit, wherein the second end guide is in contact with the electrostatic chuck base assembly and includes a friction reducing coating disposed thereon; and
a connector physically coupled to the bottom surface of the ground plate, the connector housing a portion of the tubular member, the first end guide and spring seal disposed below the bottom surface of the ground plate and in the connector, the first end guide contacting the tubular member and the connector in a manner that restricts axial compression of the spring seal, the spring seal providing an axial seal between the spring seal and the connector.