US 12,334,312 B2
Configurable faraday shield
Maolin Long, Santa Clara, CA (US)
Assigned to Beijing E-Town Semiconductor Technology Co., Ltd., Beijing (CN); and Mattson Technology, Inc., Fremont, CA (US)
Filed by Mattson Technology, Inc., Fremont, CA (US); and Beijing E-Town Semiconductor Technology Co., Ltd., Beijing (CN)
Filed on Dec. 7, 2021, as Appl. No. 17/544,433.
Claims priority of provisional application 63/208,050, filed on Jun. 8, 2021.
Claims priority of provisional application 63/130,990, filed on Dec. 28, 2020.
Prior Publication US 2022/0208529 A1, Jun. 30, 2022
Int. Cl. H01J 37/32 (2006.01)
CPC H01J 37/32651 (2013.01) [H01J 37/321 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A configurable Faraday shield defining an axial direction, a circumferential direction, and a radial direction, the configurable Faraday shield comprising:
a plurality of ribs, each of the ribs spaced apart from one another along the circumferential direction, the plurality of ribs coupled between a first radio frequency ground plane and a second radio frequency ground plane;
a plurality of conductive straps; and
a locking member movable between at least a first position and a second position to selectively couple each of the plurality of ribs to the first radio frequency ground plane via a corresponding conductive strap of the plurality of conductive straps; wherein the locking member comprises a ring defining a plurality of notches.