Ronald Anthony Decker, Turnersville, NJ (US); and Imran Ahmed Bhutta, Moorestown, NJ (US)
Assigned to ASM IP Holding B.V., Almere (NL)
Filed by Reno Technologies, Inc., Wilmington, DE (US)
Filed on Mar. 13, 2023, as Appl. No. 18/120,591.
Application 18/120,591 is a continuation in part of application No. 17/723,702, filed on Apr. 19, 2022.
Application 17/723,702 is a continuation in part of application No. 17/363,207, filed on Jun. 30, 2021, granted, now 11,521,833, issued on Dec. 6, 2022.
Application 17/363,207 is a continuation in part of application No. 17/111,743, filed on Dec. 4, 2020, granted, now 11,476,091, issued on Oct. 18, 2022.
Application 17/111,743 is a continuation in part of application No. 16/935,643, filed on Jul. 22, 2020, granted, now 11,393,659, issued on Jul. 19, 2022.
Application 16/935,643 is a continuation in part of application No. 16/926,002, filed on Jul. 10, 2020, granted, now 11,101,110, issued on Aug. 24, 2021.
Application 16/926,002 is a continuation in part of application No. 16/839,424, filed on Apr. 3, 2020, granted, now 10,741,364, issued on Aug. 11, 2020.
Application 16/839,424 is a continuation of application No. 16/804,324, filed on Feb. 28, 2020, granted, now 10,714,314, issued on Jul. 14, 2020.
Application 16/804,324 is a continuation in part of application No. 16/685,698, filed on Nov. 15, 2019, granted, now 11,120,971, issued on Sep. 14, 2021.
Application 16/685,698 is a continuation in part of application No. 16/592,453, filed on Oct. 3, 2019, granted, now 11,114,280, issued on Sep. 7, 2021.
Application 16/592,453 is a continuation in part of application No. 16/524,805, filed on Jul. 29, 2019, granted, now 10,727,029, issued on Jul. 28, 2020.
Application 16/524,805 is a continuation in part of application No. 16/502,656, filed on Jul. 3, 2019, granted, now 11,315,758, issued on Apr. 26, 2022.
Application 16/502,656 is a continuation in part of application No. 16/029,742, filed on Jul. 9, 2018, granted, now 10,483,090, issued on Nov. 19, 2019.
Claims priority of provisional application 63/177,005, filed on Apr. 20, 2021.
Claims priority of provisional application 63/059,229, filed on Jul. 31, 2020.
Claims priority of provisional application 63/004,682, filed on Apr. 3, 2020.
Claims priority of provisional application 62/943,838, filed on Dec. 5, 2019.
Claims priority of provisional application 62/876,998, filed on Jul. 22, 2019.
Claims priority of provisional application 62/873,370, filed on Jul. 12, 2019.
Claims priority of provisional application 62/812,047, filed on Feb. 28, 2019.
Claims priority of provisional application 62/812,019, filed on Feb. 28, 2019.
Claims priority of provisional application 62/812,025, filed on Feb. 28, 2019.
Claims priority of provisional application 62/782,915, filed on Dec. 20, 2018.
Claims priority of provisional application 62/767,587, filed on Nov. 15, 2018.
Claims priority of provisional application 62/741,073, filed on Oct. 4, 2018.
Claims priority of provisional application 62/711,141, filed on Jul. 27, 2018.
Claims priority of provisional application 62/693,625, filed on Jul. 3, 2018.
Claims priority of provisional application 62/530,446, filed on Jul. 10, 2017.
Prior Publication US 2023/0215696 A1, Jul. 6, 2023
a radio frequency (RF) source configured to provide RF power;
an RF impedance matching circuit comprising:
an RF input configured to receive the RF power from the RF source;
an RF output configured to operably couple to a plasma chamber;
at least one variable reactance element; and
a sensor operably coupled to a component of the matching circuit; and
a control circuit operably coupled to the RF source and to the matching circuit, the control circuit configured to:
receive a signal from the sensor indicative of a parameter value; and
upon determining the parameter value meets a first predetermined condition, transmit a control signal to the RF source causing the RF source to carry out a power control scheme, the power control scheme causing the RF source to reduce or maintain the RF power without turning off the RF power.
