US 12,334,306 B2
RF impedance matching network
Imran Ahmed Bhutta, Moorestown, NJ (US)
Assigned to ASM America, Inc., Phoenix, AZ (US)
Filed by ASM America, Inc., Phoenix, AZ (US)
Filed on Nov. 24, 2021, as Appl. No. 17/534,924.
Application 17/534,924 is a continuation of application No. 17/182,902, filed on Feb. 23, 2021, granted, now 11,189,466.
Application 17/182,902 is a continuation of application No. 16/922,228, filed on Jul. 7, 2020, granted, now 11,195,698.
Application 16/922,228 is a continuation of application No. 16/665,778, filed on Oct. 28, 2019, granted, now 10,707,057, issued on Jul. 7, 2020.
Application 16/665,778 is a continuation of application No. 16/111,776, filed on Aug. 24, 2018, granted, now 10,460,912, issued on Oct. 29, 2019.
Application 16/111,776 is a continuation of application No. 15/637,271, filed on Jun. 29, 2017, granted, now 10,431,428, issued on Oct. 1, 2019.
Application 15/637,271 is a continuation in part of application No. 15/467,667, filed on Mar. 23, 2017, granted, now 10,455,729, issued on Oct. 22, 2019.
Application 15/637,271 is a continuation in part of application No. 15/450,495, filed on Mar. 6, 2017, granted, now 10,679,824, issued on Jun. 9, 2020.
Application 15/637,271 is a continuation in part of application No. 15/223,984, filed on Jul. 29, 2016, granted, now 9,728,378, issued on Aug. 8, 2017.
Application 15/450,495 is a continuation in part of application No. 15/196,821, filed on Jun. 29, 2016, granted, now 10,699,880, issued on Jun. 30, 2020.
Application 15/223,984 is a continuation in part of application No. 15/061,020, filed on Mar. 4, 2016, granted, now 9,543,122, issued on Jan. 10, 2017.
Application 15/467,667 is a continuation in part of application No. 14/982,244, filed on Dec. 29, 2015, granted, now 10,454,453, issued on Oct. 22, 2019.
Application 15/637,271 is a continuation in part of application No. 14/936,978, filed on Nov. 10, 2015, granted, now 9,844,127, issued on Dec. 12, 2017.
Application 14/936,978 is a continuation in part of application No. 14/935,859, filed on Nov. 9, 2015, abandoned.
Application 14/982,244 is a continuation in part of application No. 14/935,859, filed on Nov. 9, 2015, abandoned.
Application 15/637,271 is a continuation in part of application No. 14/788,888, filed on Jul. 1, 2015, granted, now 9,697,991, issued on Jul. 4, 2017.
Application 15/637,271 is a continuation in part of application No. 14/702,900, filed on May 4, 2015, granted, now 9,745,660, issued on Aug. 29, 2017.
Application 15/061,020 is a continuation of application No. 14/700,209, filed on Apr. 30, 2015, granted, now 9,345,122, issued on May 17, 2016.
Application 14/935,859 is a continuation in part of application No. 14/622,879, filed on Feb. 15, 2015, abandoned.
Application 14/788,888 is a continuation in part of application No. 14/622,879, filed on Feb. 15, 2015, abandoned.
Application 14/622,879 is a continuation in part of application No. 14/616,884, filed on Feb. 9, 2015, granted, now 9,865,432, issued on Jan. 9, 2018.
Application 14/616,884 is a continuation in part of application No. 14/594,262, filed on Jan. 12, 2015, granted, now 9,496,122, issued on Nov. 15, 2016.
Claims priority of provisional application 62/312,070, filed on Mar. 23, 2016.
Claims priority of provisional application 62/303,625, filed on Mar. 4, 2016.
Claims priority of provisional application 62/185,998, filed on Jun. 29, 2015.
Claims priority of provisional application 62/097,498, filed on Dec. 29, 2014.
Claims priority of provisional application 62/077,753, filed on Nov. 10, 2014.
Claims priority of provisional application 62/077,750, filed on Nov. 10, 2014.
Claims priority of provisional application 62/019,591, filed on Jul. 1, 2014.
Claims priority of provisional application 61/987,725, filed on May 2, 2014.
Claims priority of provisional application 61/987,718, filed on May 2, 2014.
Claims priority of provisional application 61/940,165, filed on Feb. 14, 2014.
Claims priority of provisional application 61/940,139, filed on Feb. 14, 2014.
Claims priority of provisional application 61/925,974, filed on Jan. 10, 2014.
Prior Publication US 2022/0084791 A1, Mar. 17, 2022
Int. Cl. H03H 7/38 (2006.01); H01G 7/00 (2006.01); H01J 37/32 (2006.01); H01L 21/02 (2006.01); H01L 21/311 (2006.01); H03H 11/28 (2006.01); H05K 7/20 (2006.01); H01L 23/473 (2006.01)
CPC H01J 37/32183 (2013.01) [H01G 7/00 (2013.01); H01J 37/32935 (2013.01); H01L 21/02274 (2013.01); H01L 21/31116 (2013.01); H03H 7/38 (2013.01); H03H 11/28 (2013.01); H05K 7/20609 (2013.01); H01J 2237/327 (2013.01); H01J 2237/332 (2013.01); H01J 2237/334 (2013.01); H01L 23/473 (2013.01)] 42 Claims
OG exemplary drawing
 
1. A radio frequency (RF) impedance matching circuit comprising:
an RF input configured to operably couple to an RF source and to receive an RF signal at a first frequency from the RF source, the RF source having a fixed output impedance;
an RF output configured to operably couple to a plasma chamber;
a first electronically variable capacitor (EVC) coupled to the RF input to receive the RF signal from the RF source at the first frequency;
a second EVC separate and distinct from the first EVC, the second EVC coupled to the RF input to receive the RF signal from the RF source at the first frequency, wherein the first EVC has two terminals, the second EVC has two terminals, and the two terminals of the first EVC are not both common to the two terminals of the second EVC; and
a control circuit operably coupled to the first and second EVCs and configured to:
determine a first parameter related to the plasma chamber, the matching circuit, or the RF source;
determine, based on the first parameter, both:
a first capacitance value or configuration (CVOC) for the first EVC; and
a second CVOC for the second EVC; and
generate one or more control signals to alter the first EVC to the first CVOC and the second EVC to the second CVOC;
wherein the alteration of the first EVC and the second EVC causes RF power reflected back to the RF source to decrease.