US 12,334,303 B2
Apparatus for producing a waveform
Hien Minh Nguyen, Longmont, CO (US); and Gideon Van Zyl, Fort Collins, CO (US)
Assigned to Advanced Energy Industries, Inc., Denver, CO (US)
Filed by Advanced Energy Industries, Inc., Denver, CO (US)
Filed on May 17, 2023, as Appl. No. 18/318,861.
Application 18/318,861 is a continuation of application No. 16/926,876, filed on Jul. 13, 2020, granted, now 11,887,812.
Claims priority of provisional application 62/873,680, filed on Jul. 12, 2019.
Prior Publication US 2024/0030001 A1, Jan. 25, 2024
Int. Cl. H01J 37/32 (2006.01); H01L 21/67 (2006.01)
CPC H01J 37/32128 (2013.01) [H01L 21/67069 (2013.01); H01J 2237/327 (2013.01)] 14 Claims
OG exemplary drawing
 
1. An apparatus to produce a waveform, the apparatus comprising:
a first node;
a switched path that couples a second node to the first node, and responsive to the switched path being closed, a pulse is initiated at the first node; and
a power supply coupled to the first node, the power supply configured to produce, after the switched path is open, a ramped voltage at the first node;
control circuitry to:
repeatedly close and open the switched path to produce pulses; and
adjust current to the first node by varying a non-zero repetition rate of the closing and opening of the switched path.