| CPC H01J 37/32018 (2013.01) [A61L 2/14 (2013.01); A61L 2/202 (2013.01); A61L 2/26 (2013.01); H01J 37/32449 (2013.01); H01J 37/32577 (2013.01); A61L 2202/11 (2013.01)] | 15 Claims |
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1. A glow discharge cell, comprising:
a gas inlet port, intended to allow a gas flow to access;
a plasma formation chamber integrated in the gas inlet port;
a primary electrode, in contact with the plasma formation chamber;
a gas evacuation chamber, intended to allow the relaxation of species formed in the gas and/or the neutralization of free radicals; and
a gas outlet port, which is attached to the evacuation chamber and is intended to lead the gas flow out of the glow discharge cell;
wherein:
the gas outlet port and the gas evacuation chamber are formed by a first glass tube, bent in shape, the plasma formation chamber being provided in a first branch of the first glass tube and the gas outlet port being provided in a second branch of the first glass tube, the second branch being smaller in diameter than the first branch and perpendicular thereto;
the gas inlet port and the plasma formation chamber are formed by a second glass tube, straight and arranged parallel to the first branch of the first glass tube and being partially inserted into said first branch, so that the second glass tube is in contact with the inside of the gas evacuation chamber; and
the primary electrode is encapsulated in a wall of the first branch of the first glass tube, said primary electrode further being arranged facing the second glass tube and being partially inserted therein.
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