US 12,334,301 B2
Plasma source and method for removing materials from substrates utilizing pressure waves
Peter Joseph Yancey, Cary, NC (US)
Assigned to Atmospheric Plasma Solutions, Inc., Cary, NC (US)
Filed by Atmospheric Plasma Solutions, Inc., Cary, NC (US)
Filed on Oct. 26, 2023, as Appl. No. 18/383,943.
Application 17/162,681 is a division of application No. 12/702,039, filed on Feb. 8, 2010, granted, now 10,984,984, issued on Apr. 20, 2021.
Application 18/383,943 is a continuation of application No. 17/162,681, filed on Jan. 29, 2021, granted, now 11,810,756.
Claims priority of provisional application 61/150,795, filed on Feb. 8, 2009.
Prior Publication US 2024/0055224 A1, Feb. 15, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. H01J 37/32 (2006.01); B08B 7/00 (2006.01); B44D 3/16 (2006.01); C23G 5/00 (2006.01); H05H 1/24 (2006.01)
CPC H01J 37/32009 (2013.01) [B08B 7/0035 (2013.01); B44D 3/16 (2013.01); C23G 5/00 (2013.01); H05H 1/2481 (2021.05); H05H 1/2487 (2021.05)] 10 Claims
OG exemplary drawing
 
1. An atmospheric pressure plasma source comprising:
a plasma-generating chamber for generating atmospheric pressure, non-thermal plasma, wherein the plasma-generating chamber defines an interior space including a plasma-generating region;
a gas inlet for providing a flow path for plasma-generating gas to feed into the plasma-generating region;
a powered electrode extending into the interior space of the plasma-generating chamber, wherein the powered electrode is at least partially within the plasma-generating region, configured to outlet the plasma to outside the plasma-generating chamber, wherein the powered electrode causes an electrical field to impress between the powered electrode and the plasma-generating chamber for generating vibrations of the plasma-generating chamber, wherein the vibrations are transferred to the plasma within the plasma-generating chamber for generating pressure waves in a plasma plume outlet from the plasma-generating chamber; and
a plasma outlet communicating with the plasma-generating chamber for outletting the plasma plume.