US 12,334,274 B2
Trench capacitors
Appo Van Der Wiel, Tessenderlo (BE); Piet De Pauw, Ypres (BE); and Ralf Lerner, Erfurt (DE)
Assigned to Melexis Technologies NV, Tessenderlo (BE); and X-FAB Global Services GmbH, Erfurt (DE)
Filed by Melexis Technologies NV, Tessenderlo (BE); and X-FAB Global Services GmbH, Erfurt (DE)
Filed on Apr. 25, 2023, as Appl. No. 18/306,731.
Claims priority of application No. 22175743 (EP), filed on May 27, 2022.
Prior Publication US 2023/0386752 A1, Nov. 30, 2023
Int. Cl. H01G 4/33 (2006.01); H01G 4/01 (2006.01); H01G 4/012 (2006.01); H01G 4/38 (2006.01); H10D 1/00 (2025.01); H10D 1/68 (2025.01)
CPC H01G 4/33 (2013.01) [H01G 4/01 (2013.01); H01G 4/012 (2013.01); H01G 4/385 (2013.01); H10D 1/043 (2025.01); H10D 1/716 (2025.01)] 16 Claims
OG exemplary drawing
 
1. A unit trench capacitor in a substrate, the unit trench capacitor comprising one or more trenches in the substrate, a dielectric layer, a first electrode and a second electrode,
wherein walls of the one or more trenches are covered by the dielectric layer which separates the first electrode from the second electrode,
wherein each trench follows a closed curve, and
wherein the closed curve of each trench has one or more elongated parts in directions in which the substrate has a maximum elastic modulus, or
wherein the closed curve of each trench has a circular shape if the substrate has an isotropic elastic modulus.