US 12,334,265 B2
Electronic component having the dielectric film not covers a corner part of the lower electrode
Kazuhiro Yoshikawa, Tokyo (JP); Kenichi Yoshida, Tokyo (JP); and Takashi Ohtsuka, Tokyo (JP)
Assigned to TDK Corporation, Tokyo (JP)
Appl. No. 17/784,857
Filed by TDK Corporation, Tokyo (JP)
PCT Filed Dec. 4, 2020, PCT No. PCT/JP2020/045209
§ 371(c)(1), (2) Date Jun. 13, 2022,
PCT Pub. No. WO2021/124926, PCT Pub. Date Jun. 24, 2021.
Claims priority of application No. 2019-229654 (JP), filed on Dec. 19, 2019.
Prior Publication US 2023/0005667 A1, Jan. 5, 2023
Int. Cl. H01G 4/30 (2006.01); H01G 4/08 (2006.01); H01G 4/224 (2006.01); H01G 4/40 (2006.01)
CPC H01G 4/224 (2013.01) [H01G 4/08 (2013.01); H01G 4/30 (2013.01); H01G 4/40 (2013.01)] 11 Claims
OG exemplary drawing
 
1. An electronic component comprising:
a lower electrode provided on a main surface of a substrate;
a dielectric film that covers at least top and side surfaces of the lower electrode; and
an upper electrode stacked on the top surface of the lower electrode through the dielectric film,
wherein a part of the dielectric film that is parallel to the main surface of the substrate is removed at least partly, and
wherein a part of the dielectric film that covers a corner part that is a terminal edge between the top and side surfaces of the lower electrode is removed at least partly.