US 12,332,687 B2
Substrate loading device and substrate loading method
Heesung Lim, Yongin-si (KR)
Assigned to Samsung Display Co., Ltd., Yongin-si (KR)
Filed by Samsung Display Co., Ltd., Yongin-Si (KR)
Filed on Jun. 13, 2024, as Appl. No. 18/741,778.
Claims priority of application No. 10-2023-0078439 (KR), filed on Jun. 19, 2023.
Prior Publication US 2024/0419213 A1, Dec. 19, 2024
Int. Cl. G06F 1/16 (2006.01); G06F 1/18 (2006.01)
CPC G06F 1/1626 (2013.01) [G06F 1/181 (2013.01); G06F 1/186 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A substrate loading device, comprising:
a side surface fixing portion including side surface grooves into which first and second side surfaces, opposite to each other in a first direction, of a substrate are inserted, and extending in a second direction crossing the first direction; and
a base fixing portion including a base groove into which a third side surface of the substrate, connecting the first side surface to the second side surface, is inserted,
wherein the base fixing portion includes at least one inclined surface defining the base groove, and
the inclined surface overlaps, on a plane, a central axis passing through centers of the side surface grooves and parallel to the first direction.