US 12,332,630 B2
Information processing apparatus and substrate processing method
Hiroshi Ogino, Sapporo (JP); Masanori Saito, Sapporo (JP); Noriaki Kanaya, Sapporo (JP); and Yasuhiro Tsuruma, Sapporo (JP)
Assigned to TOKYO ELECTRON LIMITED, Tokyo (JP)
Appl. No. 17/638,121
Filed by TOKYO ELECTRON LIMITED, Tokyo (JP)
PCT Filed Aug. 12, 2020, PCT No. PCT/JP2020/030646
§ 371(c)(1), (2) Date Feb. 24, 2022,
PCT Pub. No. WO2021/039389, PCT Pub. Date Mar. 4, 2021.
Claims priority of application No. 2019-153360 (JP), filed on Aug. 26, 2019.
Prior Publication US 2022/0291662 A1, Sep. 15, 2022
Int. Cl. G05B 19/4099 (2006.01); H01L 21/67 (2006.01)
CPC G05B 19/4099 (2013.01) [G05B 2219/45031 (2013.01); H01L 21/67167 (2013.01)] 7 Claims
OG exemplary drawing
 
1. An information processing apparatus connected to a substrate processing apparatus, the information processing apparatus comprising:
a memory configured to store an operation data item created when a recipe serving as a processing condition of the substrate processing apparatus is executed, in association with an identifier calculated from the recipe; and
a processor coupled to the memory and configured to process an overall operation of the information processing apparatus,
wherein the processor includes:
reception circuitry configured to receive a processing instruction including a recipe;
calculation circuitry configured to calculate an identifier from the recipe received at the reception circuitry;
determination circuitry configured to determine whether an identical identifier to the calculated identifier is stored in the memory; and
control circuitry configured to:
when the determination circuitry determines that the identical identifier is stored in the memory, control the substrate processing apparatus using the recipe received at the reception circuitry and the operation data item corresponding to the identical identifier, and
control the substrate processing apparatus using the recipe received at the reception circuitry and the operation data item generated when the recipe, corresponding to the identical identifier, is executed.