US 12,332,570 B2
Lithographic system provided with a deflection apparatus for changing a trajectory of particulate debris
Ronald Peter Albright, Norwalk, CT (US); Kursat Bal, Arnhem (NL); Vadim Yevgenyevich Joseph Banine, Deurne (NL); Richard Joseph Bruls, Eindhoven (NL); Sjoerd Frans De Vries, Eindhoven (NL); Olav Waldemar Vladimir Frijns, Rosmalen (NL); Yang-Shan Huang, Veldhoven (NL); Zhuangxiong Huang, Eindhoven (NL); Johannes Henricus Wilhelmus Jacobs, Heeze (NL); Johannes Hubertus Josephina Moors, Roosteren (NL); Georgi Nenchev Nenchev, Veldhoven (NL); Andrey Nikipelov, Eindhoven (NL); Thomas Maarten Raasveld, Eindhoven (NL); Manish Ranjan, Eindhoven (NL); Edwin Te Sligte, Waalre (NL); Karl Robert Umstadter, San Diego, CA (US); Eray Uzgören, Eindhoven (NL); Marcus Adrianus Van De Kerkhof, Helmond (NL); and Parham Yaghoobi, Eindhoven (NL)
Assigned to ASML Holding N.V., Veldhoven (NL); and ASML Netherlands B.V., Veldhoven (NL)
Appl. No. 17/794,897
Filed by ASML Holding N.V., Veldhoven (NL); and ASML Netherlands B.V., Veldhoven (NL)
PCT Filed Dec. 24, 2020, PCT No. PCT/EP2020/087889
§ 371(c)(1), (2) Date Jul. 22, 2022,
PCT Pub. No. WO2021/148224, PCT Pub. Date Jul. 29, 2021.
Claims priority of provisional application 62/965,140, filed on Jan. 23, 2020.
Claims priority of provisional application 63/048,513, filed on Jul. 6, 2020.
Prior Publication US 2023/0063156 A1, Mar. 2, 2023
Int. Cl. G03F 7/20 (2006.01); G03F 7/00 (2006.01)
CPC G03F 7/70033 (2013.01) [G03F 7/70916 (2013.01); G03F 7/70058 (2013.01)] 15 Claims
OG exemplary drawing
 
1. An apparatus comprising:
a radiation receiving apparatus provided with an opening operable to receive radiation from a radiation source through the opening;
wherein the radiation receiving apparatus comprises a deflection apparatus arranged to change a trajectory of a particle moving through the opening arriving at the radiation receiving apparatus; and
wherein the deflection apparatus comprises:
first and second electrodes proximate to the opening, the first and second electrodes being spaced apart in a direction at least partially across the opening;
wherein the first electrode comprises:
a first portion substantially disposed within a shadow of an obscuration; and
a plurality of fins extending from the first portion out of the shadow;
wherein the second electrode is hollow and is disposed outside of a light path of the radiation; and
wherein the first electrode is disposed within the second electrode.