US 12,332,541 B2
Method for generating broadband radiation and associated broadband source and metrology device
Yongfeng Ni, Waalre (NL)
Assigned to ASML NETHERLANDS B.V., Veldhoven (NL)
Appl. No. 18/014,724
Filed by ASML NETHERLANDS B.V., Veldhoven (NL)
PCT Filed Jul. 6, 2021, PCT No. PCT/EP2021/068602
§ 371(c)(1), (2) Date Jan. 5, 2023,
PCT Pub. No. WO2022/028796, PCT Pub. Date Feb. 10, 2022.
Claims priority of application No. 20189212 (EP), filed on Aug. 3, 2020; and application No. 20198713 (EP), filed on Sep. 28, 2020.
Prior Publication US 2023/0273502 A1, Aug. 31, 2023
Int. Cl. G02F 1/365 (2006.01); G02F 1/35 (2006.01); G02F 1/355 (2006.01); G03F 7/00 (2006.01)
CPC G02F 1/365 (2013.01) [G02F 1/3551 (2013.01); G03F 7/706847 (2023.05); G02F 1/3528 (2021.01); G02F 2202/32 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method of generating broadband output radiation by excitation of a working medium within a hollow core photonic crystal fiber, the method comprising:
generating input radiation comprising pulses having a duration in the range of 50 fs to 400 fs full width at half maximum (FWHM) and having a rise time of less than 60 fs, the rise time being the time from 10% of pulse peak intensity to 90% of pulse peak intensity; and
exciting the working medium with the input radiation.