US 12,332,534 B2
Optical waveguide device, optical modulator, optical modulation module, and optical transmission apparatus
Shotaro Hirata, Tokyo (JP); Masayuki Motoya, Tokyo (JP); Kosuke Okahashi, Tokyo (JP); Yu Kataoka, Tokyo (JP); and Shingo Takano, Tokyo (JP)
Assigned to SUMITOMO OSAKA CEMENT CO., LTD., Tokyo (JP)
Filed by SUMITOMO OSAKA CEMENT CO., LTD., Tokyo (JP)
Filed on May 27, 2022, as Appl. No. 17/827,035.
Claims priority of application No. 2021-089824 (JP), filed on May 28, 2021.
Prior Publication US 2022/0382119 A1, Dec. 1, 2022
Int. Cl. G02F 1/225 (2006.01); G02F 1/01 (2006.01); G02F 1/03 (2006.01); G02F 1/035 (2006.01); G02F 1/21 (2006.01)
CPC G02F 1/225 (2013.01) [G02F 1/0113 (2021.01); G02F 1/0316 (2013.01); G02F 1/035 (2013.01); G02F 1/212 (2021.01); G02F 2201/127 (2013.01); G02F 2202/16 (2013.01)] 21 Claims
OG exemplary drawing
 
1. An optical waveguide device comprising:
a substrate;
an optical waveguide formed on the substrate; and
a working electrode that controls a light wave propagating through the optical waveguide, the working electrode including a signal electrode and a ground electrode that sandwich a parallel waveguide of the optical waveguide in a plane of the substrate, and the working electrode includes-including a first base layer made of a first material, and a first conductive layer on the first base layer,layer; and
a plurality of conductor patterns not connected to the working electrode formed in a region other than a path from an input end to an output end of the optical waveguide, in a region of the substrate,
wherein
the optical waveguide includes:
a first nest-shaped Mach-Zehnder type optical waveguide including a first Mach-Zehnder type optical waveguide; and
a second Mach-Zehnder type optical waveguide,
at a first Y-branch coupler that is a Y-branch coupler of the first nest-shaped Mach-Zehnder type optical waveguide, a first radiated light beam waveguide is provided to propagate a radiated light beam leaking from the first nest-shaped Mach-Zehnder type optical waveguide without being combined,
the plurality of conductor patterns include a second base layer made of a second material different from the first material and a second conductive layer on the second base layer, and
the plurality of conductor patterns include a first conductor pattern that is disposed to cover at least a part of the first radiated light beam waveguide in a vicinity of an output end of an output waveguide which is an output end of a signal light.