US 12,332,431 B2
Compensation of pupil aberration of a lens objective
Zheng Yang, Friedrichshafen (DE)
Assigned to HEXAGON TECHNOLOGY CENTER GMBH, Heerbrugg (CH)
Filed by HEXAGON TECHNOLOGY CENTER GMBH, Heerbrugg (DE)
Filed on Dec. 3, 2021, as Appl. No. 17/542,071.
Claims priority of application No. 20211905 (EP), filed on Dec. 4, 2020.
Prior Publication US 2022/0179202 A1, Jun. 9, 2022
Int. Cl. G02B 27/00 (2006.01); G01B 5/008 (2006.01); G02B 3/08 (2006.01)
CPC G02B 27/0068 (2013.01) [G01B 5/008 (2013.01); G02B 3/08 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A lens objective system comprising:
a lens objective comprising a set of optical elements, wherein each optical element defines particular optical properties, the optical properties of the optical elements induce optical aberrations of the lens objective, the optical aberrations comprising at least:
image aberration causing aberration of a marginal ray of a light bundle relative to a chief ray of the light bundle, and
pupil aberration causing a lateral offset (Δz) of a first intersection point relative to a second intersection point along an optical axis of the lens objective, the first intersection point is defined by an intersection of the optical axis and a first chief ray having a first incident angle (u′), the second intersection point is defined by an intersection of the optical axis and a second chief ray having a second incident angle, the first incident angle is different from the second incident angle,
an optical compensation element configured to manipulate a propagation path of light transmitting the optical compensation element, wherein the optical compensation element is configured and arranged relative to the lens objective so that the lateral offset (Δz) caused by pupil aberration is reduced,
wherein the optical compensation element is configured so that an extent of reducing pupil aberration is significantly greater than an extent of reducing image aberration, and
wherein the optical compensation element provides reduction of the lateral offset (Δz) caused by pupil aberration while image aberration of the lens objective remains basically unchanged.