US 12,332,428 B2
Comb-driven MEMS resonant scanner with full-circumferential range and large out-of-plane translational displacement
Haijun Li, Ann Arbor, MI (US); and Thomas D. Wang, Ann Arbor, MI (US)
Assigned to THE REGENTS OF THE UNIVERSITY OF MICHIGAN, Ann Arbor, MI (US)
Appl. No. 17/439,728
Filed by THE REGENTS OF THE UNIVERSITY OF MICHIGAN, Ann Arbor, MI (US)
PCT Filed Mar. 18, 2020, PCT No. PCT/US2020/023397
§ 371(c)(1), (2) Date Sep. 15, 2021,
PCT Pub. No. WO2020/191077, PCT Pub. Date Sep. 24, 2020.
Claims priority of provisional application 62/820,032, filed on Mar. 18, 2019.
Prior Publication US 2022/0155584 A1, May 19, 2022
Int. Cl. G02B 26/10 (2006.01); A61B 1/00 (2006.01); B81B 3/00 (2006.01); G02B 26/08 (2006.01)
CPC G02B 26/101 (2013.01) [A61B 1/00172 (2013.01); B81B 3/0043 (2013.01); G02B 26/0841 (2013.01); B81B 2201/042 (2013.01); B81B 2203/0136 (2013.01); B81B 2203/0163 (2013.01); B81B 2203/04 (2013.01); B81B 2203/053 (2013.01); B81B 2203/058 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A scanning assembly for use in an optical instrument, the scanning assembly comprising:
a frame providing a support;
a reflector suspended in an interior region of the frame for scanning a beam of the optical instrument;
a folded-beam spring assembly coupled to the reflector and configured to provide deflection of the reflector for beam scanning in an out-of-plane direction;
a lever suspension assembly coupled to a frame of the scanning assembly and coupled to the folded-beam spring assembly positioned between the lever suspension assembly and the reflector, the lever suspension assembly configured to provide torsional movement of the reflector for beam scanning over a two-dimensional region, the lever suspension assembly having lever arms, wherein the lever suspension assembly comprises a first lever suspension and a second lever suspension, each of the first and the second lever suspensions having lever arms being mechanically coupled to the frame of the scanning assembly and to the folded-beam spring assembly, each lever arm being flexible to provide for deflection of the reflector; and
a comb drive assembly connected to the lever suspension assembly for controlling torsional and/or translational movement of the reflector.