US 12,332,350 B2
System and method for orthogonal laser metrology
Malcolm George Humphrey, West Sussex (GB); and Itai Vishnia, Setauket, NY (US)
Assigned to PLX, Inc., Deer Park, NY (US)
Filed by PLX, Inc., Deer Park, NY (US)
Filed on Apr. 7, 2021, as Appl. No. 17/224,279.
Prior Publication US 2022/0326379 A1, Oct. 13, 2022
Int. Cl. G01S 17/06 (2006.01); G01B 21/22 (2006.01); G01S 7/481 (2006.01); G01S 17/88 (2006.01)
CPC G01S 17/06 (2013.01) [G01B 21/22 (2013.01); G01S 7/4814 (2013.01); G01S 7/4816 (2013.01); G01S 7/4817 (2013.01); G01S 17/88 (2013.01)] 27 Claims
OG exemplary drawing
 
1. An orthogonal laser metrology sensor system for detecting an object and its position in a field of view of a beam fan, the system comprising:
a reflection detector sensor array arranged to detect a light beam reflected by the object impinged by the beam fan in the field of view and output a reflected beam position trigger signal;
a line sensor arranged to capture an image of the reflected light beam and output beam reflection data corresponding to the light beam;
an angle position sensor array arranged to detect an angle of the beam fan with respect to a central axis and output a beam fan position signal; and
a speedup processor arranged to
receive the reflected beam position trigger signal,
receive the beam reflection data,
receive the beam fan position signal, and
output the beam reflection data to a central processor,
wherein a position of the object in the field of view is determined based on the beam reflection data and beam fan position signal.