US 12,332,279 B2
Preheating control system, preheating control method and non-transient computer readable storage medium
Tien Yu Chen, New Taipei (TW)
Assigned to NANYA TECHNOLOGY CORPORATION, New Taipei (TW)
Filed by NANYA TECHNOLOGY CORPORATION, New Taipei (TW)
Filed on Apr. 12, 2023, as Appl. No. 18/299,711.
Prior Publication US 2024/0345135 A1, Oct. 17, 2024
Int. Cl. G01R 31/44 (2020.01); G01R 1/44 (2006.01); G01R 31/28 (2006.01); H01L 21/66 (2006.01); H01L 21/67 (2006.01)
CPC G01R 1/44 (2013.01) [G01R 31/2831 (2013.01); H01L 21/67103 (2013.01); H01L 22/14 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A preheating control system, comprising:
a testing device, configured to perform a wafer testing on a wafer lot and perform a device preheating on the testing device; and
a processor, coupled to the testing device, comprising:
a timing circuit, configured to calculate a lot-changing time, wherein the lot-changing time is a difference between a time corresponding to removal of a previous wafer lot from the testing device and a time corresponding to insertion of the wafer lot into the testing device; and
a controlling circuit, configured to control the testing device to perform the wafer testing, and configured to control the testing device to perform the device preheating according to the lot-changing time and a standard lot-changing time.