US 12,332,278 B2
Probe card
Chikaomi Mori, Hyogo (JP)
Assigned to JAPAN ELECTRONIC MATERIALS CORPORATION, Hyogo (JP)
Appl. No. 18/024,055
Filed by Japan Electronic Materials Corporation, Hyogo (JP)
PCT Filed Sep. 15, 2020, PCT No. PCT/JP2020/034931
§ 371(c)(1), (2) Date Mar. 1, 2023,
PCT Pub. No. WO2022/059070, PCT Pub. Date Mar. 24, 2022.
Prior Publication US 2023/0266365 A1, Aug. 24, 2023
Int. Cl. G01R 1/073 (2006.01); G01R 31/28 (2006.01)
CPC G01R 1/07371 (2013.01) [G01R 1/07328 (2013.01); G01R 31/2889 (2013.01)] 3 Claims
OG exemplary drawing
 
1. A probe card comprising:
two or more probes; and
a first guide plate having two or more first guide holes through which the probes are inserted, respectively,
wherein the probe is arranged to be inclined with respect to the first guide plate and has:
a locking portion that protrudes from a first sidewall of the probe above the first guide plate and is locked to the first guide plate, the first sidewall being at an acute angle with respect to the first guide plate, and
a recess formed by offsetting a second sidewall opposite to the first sidewall toward the locking portion, the second sidewall being at an obtuse angle with respect to the first guide plate,
the locking portion of one of the probes opposes the recess of another of the probes adjacent to the one,
a lower surface of the recess is formed below a lower surface of the locking portion on the central axis of the probe, and
an outermost edge of an upper surface of the recess is formed above an outermost edge of an upper surface of the locking portion on the central axis of the probe.