| CPC G01P 5/12 (2013.01) [B01L 3/502707 (2013.01); B01L 3/502746 (2013.01); G01F 1/692 (2013.01); B01L 3/502723 (2013.01); B01L 2200/0684 (2013.01); B01L 2200/12 (2013.01); B01L 2300/0645 (2013.01); B01L 2300/0681 (2013.01); B01L 2300/0816 (2013.01); B01L 2300/0887 (2013.01); B01L 2300/123 (2013.01); B01L 2300/165 (2013.01); B01L 2300/1827 (2013.01); B01L 2400/049 (2013.01); B01L 2400/086 (2013.01)] | 11 Claims |

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1. A microfluidic device, comprising:
an upper panel including a microfluidic channel through which fluid passes;
a porous ultra-thin film which is attached on a lower surface of the microfluidic channel to be integrated with the upper panel and includes a support pattern protruding to remove micro bubbles included in fluid passing through the microfluidic channel in real time;
a lower panel which is in contact with lower surfaces of the upper panel and the porous ultra-thin film; and
a negative pressure forming unit which forms a negative pressure between the microfluidic channel to which the porous ultra-thin film is attached and the lower panel.
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