US 12,332,221 B2
Supercritical fluid apparatus and pressure control method used in supercritical fluid apparatus
Michiaki Owa, Kyoto (JP)
Assigned to SHIMADZU CORPORATION, Kyoto (JP)
Appl. No. 17/616,657
Filed by SHIMADZU CORPORATION, Kyoto (JP)
PCT Filed Jun. 11, 2019, PCT No. PCT/JP2019/023153
§ 371(c)(1), (2) Date Dec. 5, 2021,
PCT Pub. No. WO2020/250314, PCT Pub. Date Dec. 17, 2020.
Prior Publication US 2022/0229023 A1, Jul. 21, 2022
Int. Cl. G01N 30/28 (2006.01); B01D 15/40 (2006.01); G01N 30/32 (2006.01); G05D 16/20 (2006.01); G01N 30/02 (2006.01)
CPC G01N 30/28 (2013.01) [B01D 15/40 (2013.01); G05D 16/20 (2013.01); G01N 2030/027 (2013.01); G01N 2030/285 (2013.01); G01N 30/32 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A supercritical fluid apparatus comprising:
a solvent supplier that supplies a solvent;
a column provided in a flow path for a solvent supplied by the solvent supplier;
a pressure control device provided further downstream than the column in the flow path;
a controller that controls the pressure control device; and
a pressure sensor that detects a pressure in the flow path, wherein
the controller includes
a first controller configured to increase the pressure in the flow path including the column, put the solvent in a supercritical fluid state and maintain an environment for execution of a predetermined process by controlling the pressure control device, and
a second controller configured to set an intermediate target value for the pressure in the flow path including the column and feedback-control the pressure control device based on a difference between the intermediate target value and a pressure value obtained by the pressure sensor to lower the pressure in the flow path toward the intermediate target value to protect the column, when ending the environment for execution of a predetermined process.