| CPC G01N 21/8806 (2013.01) [G02B 9/60 (2013.01); G02B 9/64 (2013.01); G01N 2021/8822 (2013.01); G01N 2021/8835 (2013.01); G01N 21/9501 (2013.01); G01N 2201/0636 (2013.01); G01N 2201/0668 (2013.01)] | 14 Claims |

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1. A dual lens inspection device, comprising:
a body;
a low power lens group, arranged on one side of the inner edge of the body, and the low power lens group has a plurality of lenses to satisfy the condition value of 3.0≥magnification≥1.0;
a high power lens group, arranged on the inner edge of the body and adjacent to the side of the low power lens group, and the high power lens group has a plurality of lenses to satisfy the condition value of 25.0≥magnification≥15.0;
a light source module, arranged on the outer edge of the body, and projecting an illumination light source to the low power lens group and the high power lens group;
a beam splitter, arranged on the inner edge of the body and on the optical path of the illumination light source, so as to generate a first optical path passing through the low power lens group and a second optical path passing through the high power lens group, and the first optical path and the second optical path are projected on an object located on the same plane;
a first luminous flux module, arranged between the low power lens group and the beam splitter, and is located on the first optical path; a second luminous flux module, arranged between the high power lens group and the beam splitter, and is located on the second optical path, and the first luminous flux module and second luminous flux module are used to control the luminous flux of the first optical path and the second optical path, and then achieve the effect of dark field illumination;
a camera, arranged on the outer edge of the body and adjacent to the side of the light source module, the camera uses the beam splitter to achieve a beam steering effect between the first optical path and the second optical path, and then captures the image of the object;
whereby the low power lens group will mark the detection point of the object, and then move the device so that the high power lens group can accurately inspect the detection point of the object, so as to achieve small-volume high-precision detection results.
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