US 12,332,176 B2
Dark field illumination based on laser illuminated phosphor
Amnon Menachem, Zefat (IL); Yuval Weissler, Migdal-Haemek (IL); and Zehava Ben Ezer, Balfuria (IL)
Assigned to CAMTEK Ltd., Migdal-Haemek (IL)
Filed by CAMTEK Ltd., Migdal-Haemek (IL)
Filed on Apr. 20, 2023, as Appl. No. 18/304,260.
Application 18/304,260 is a continuation in part of application No. PCT/IB2021/059641, filed on Oct. 20, 2021.
Claims priority of provisional application 63/094,089, filed on Oct. 20, 2020.
Prior Publication US 2023/0251198 A1, Aug. 10, 2023
Int. Cl. G01N 21/64 (2006.01); G01N 21/88 (2006.01); G01N 21/95 (2006.01)
CPC G01N 21/645 (2013.01) [G01N 21/8806 (2013.01); G01N 21/9501 (2013.01); G01N 2021/6484 (2013.01); G01N 2021/8816 (2013.01); G01N 2021/8822 (2013.01); G01N 2021/8838 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An illumination module, comprising:
a laser diode array configured to emit laser radiation;
a phosphor illumination unit that is configured to emit phosphor radiation following an exposure to the laser radiation;
a multiple-angle illumination unit;
and intermediate optics that is configured to convey the phosphor radiation to the multiple-angle illumination unit; and
wherein the multiple-angle illumination unit is configured to receive the phosphor radiation and to dark field illuminate a region of a sample wafer from multiple angles during inspection of the wafer.