US 12,332,166 B2
Method for pre-calibrating and correcting measurement errors of a spectroscopic measurement device, and measurement device
Peter Westphal, Jena (DE); Daniel Bublitz, Rausdorf (DE); and Karsten Lindig, Erfurt (DE)
Assigned to Carl Zeiss Spectroscopy GmbH, Jena (DE)
Filed by Carl Zeiss Spectroscopy GmbH, Jena (DE)
Filed on Jun. 8, 2023, as Appl. No. 18/207,189.
Claims priority of application No. 10 2022 115 363.0 (DE), filed on Jun. 21, 2022.
Prior Publication US 2023/0408402 A1, Dec. 21, 2023
Int. Cl. G01N 21/31 (2006.01)
CPC G01N 21/31 (2013.01) [G01N 2201/127 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A method for pre-calibrating a spectroscopic measurement device comprising a control unit, a light source, a sample holder arranged in the beam path of the light source and defining a measurement location, and a spectral measurement module which has a photosensor with a plurality of organic photodiodes arranged on a substrate and with a temperature sensor, with calibration values being determined at the measurement location and reference values being determined in a reference measurement plane, the said method comprising the following steps:
i.) arranging a bright calibration sample at the measurement location and determining a bright calibration value by measuring a deflected radiation by means of the photosensor;
ii. arranging a dark calibration sample at the measurement location and determining a dark calibration value by measuring a deflected radiation by means of the photosensor;
iii.) arranging a bright reference sample in the reference measurement plane and determining a bright reference value by measuring a deflected radiation by means of the photosensor;
iv.) arranging a dark reference sample in the reference measurement plane and determining a dark reference value by measuring a deflected radiation by means of the photosensor;
v.) recording a dark current signal when the light source is switched off; and
vi.) repeating steps i. to v. at different temperatures along a predetermined temperature curve, with the temperature and a bright reference value, a bright calibration value, a darkness reference value, a darkness calibration value, and a dark current signal being recorded for each temperature value; and
vii.) storing the determined calibration and reference values in the control unit.