US 12,331,401 B2
Vaporization system
Akihiro Taguchi, Kyoto (JP)
Assigned to HORIBA STEC, Co., Ltd., Kyoto (JP)
Appl. No. 17/913,375
Filed by HORIBA STEC, Co., Ltd., Kyoto (JP)
PCT Filed Feb. 3, 2021, PCT No. PCT/JP2021/003956
§ 371(c)(1), (2) Date Sep. 21, 2022,
PCT Pub. No. WO2021/192643, PCT Pub. Date Sep. 30, 2021.
Claims priority of application No. 2020-050937 (JP), filed on Mar. 23, 2020.
Prior Publication US 2023/0134421 A1, May 4, 2023
Int. Cl. C23C 16/448 (2006.01); C23C 16/44 (2006.01); C23C 16/455 (2006.01); C23C 16/52 (2006.01)
CPC C23C 16/45561 (2013.01) [C23C 16/4409 (2013.01); C23C 16/448 (2013.01); C23C 16/52 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A vaporization system comprising:
a vaporization device that is configured to vaporize a liquid material, the vaporization device including:
a vaporizer that is configured to vaporize the liquid material;
a supply flow rate controller that is configured to control a supply flow rate of the liquid material to the vaporizer;
a casing that houses the vaporizer and the supply flow rate controller; and
an inlet port through which the liquid material is introduced and an outlet port through which vaporized gas generated by vaporizing the liquid material is discharged, the inlet port and the outlet port being provided on an exterior of the casing; and
a connection mechanism, provided on the exterior of the casing, that screws and fixes the vaporization device onto a base, the connection mechanism including:
at least one first fixing screw with which a mounting surface of a fixed port, which is at least one of the inlet port or the outlet port, is screwed and fixed onto the base;
at least one pipe member that is configured to communicate with the fixed port and through which the vaporized gas or the liquid material flows; and
at least one second fixing screw with which a pipe member mounting surface of the at least one pipe member is screwed and fixed onto the fixed port with a seal member interposed between the at least one pipe member and the fixed port, wherein
in the fixed port, the mounting surface and the pipe member mounting surface are formed on different surfaces.