| CPC C23C 16/45548 (2013.01) [C23C 16/4584 (2013.01); C23C 16/4586 (2013.01); C23C 16/52 (2013.01)] | 8 Claims |
|
1. A surface treatment apparatus, comprising:
a chamber body having a chamber and a plurality of gas channels, wherein the gas channels pass through the chamber body, surround the chamber, and are fluidly connected to the chamber;
at least one rotatable hollow prism disposed in the chamber, wherein the at least one rotatable hollow prism comprises:
a main body comprising a plurality of partitions; and
a plurality of substrate holders disposed on an outer side surface of the main body and configured to hold a plurality of substrates, wherein the partitions are respectively located between the adjacent substrate holders, and each of the substrate holders and an inner side surface of the chamber body define a processing chamber; and
a plurality of processing modules configured to supply a plurality of surface treatment agents to the processing chambers respectively through the gas channels,
wherein a normal line of a carrying surface of each of the substrate holders is non-parallel to a rotation axis of the at least one rotatable hollow prism,
when a surface treatment process is performed, the at least one rotatable hollow prism rotates, such that each of the substrates is sequentially exposed to the surface treatment agents, wherein during each of the substrates rotates away from the gas channel which is originally faced by the substrate and reaches the gas channel which is faced next by the substrate, an gas pumping action is performed on the processing chamber where the substrate is located.
|