US 12,331,397 B2
Coated forming tools with enhanced performance and increased service life
Juergen Crummenauer, Offweiler (DE); and Robin Sedlag, Langenfeld (DE)
Assigned to Oerlikon Surface Solutions AG, Pfäffikon, Pfäffikon (CH)
Appl. No. 17/615,076
Filed by Oerlikon Surface Solutions AG, Pfäffikon, Pfäffikon (CH)
PCT Filed May 29, 2020, PCT No. PCT/EP2020/064966
§ 371(c)(1), (2) Date Nov. 29, 2021,
PCT Pub. No. WO2020/239976, PCT Pub. Date Dec. 3, 2020.
Claims priority of provisional application 62/853,969, filed on May 29, 2019.
Prior Publication US 2022/0243318 A1, Aug. 4, 2022
Int. Cl. C23C 16/34 (2006.01); C23C 8/24 (2006.01); C23C 14/06 (2006.01); C23C 16/36 (2006.01); C23C 16/50 (2006.01); C23C 28/00 (2006.01); C23C 28/04 (2006.01)
CPC C23C 16/345 (2013.01) [C23C 8/24 (2013.01); C23C 16/36 (2013.01); C23C 28/044 (2013.01); C23C 28/046 (2013.01)] 12 Claims
OG exemplary drawing
 
1. Coated forming tool for processing of plastics materials or aluminum or aluminum alloy materials, comprising:
a substrate having a substrate surface, wherein the substrate surface is coated with a coating formed of one or more layers, wherein the coating comprises a Si—C—N-based layer having element composition in atomic percentage corresponding to SiaCbNcXd with 50<a+b+c<100, 0<d<60, wherein X consists of hydrogen and oxygen and optionally further consists of at least one of the group consisting of titanium, chromium, and aluminum, and
the coating further comprises a hard-thin film layer that is deposited between the substrate surface and the Si—C—N-based layer, wherein the hard-thin film layer is selected from the group consisting of a metal nitride layer, a metal oxide layer, a metal oxynitride layer, a metal carboxynitride layer, and a metal carbonitride layer, wherein the hard-thin film layer has a chemical composition in atomic percentage corresponding to the formula Me (CvNyOz)q, with Me being one or more elements selected from the group consisting of chromium, aluminum, titanium, vanadium and molybdenum, and with atomic fractions v, y and z of carbon, nitrogen and oxygen, respectively, having a value in the following ranges 0≤v≤1, 0≤y≤1, 0≤z≤1, with v+y+z=1, and with mol concentration q of the nonmetallic elements C, N and O in relation to one mol of the metallic elements Me in the following range 0.76≤q≤1.2.