| CPC C23C 16/06 (2013.01) [C23C 16/45527 (2013.01); C23C 16/45544 (2013.01); H01L 21/28556 (2013.01); H01L 21/32051 (2013.01)] | 14 Claims |
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1. A showerhead comprising:
a plurality of plenums stacked in a sequential order in an axial direction perpendicular to a semiconductor substrate, the plurality of plenums extending radially fully across the semiconductor substrate, each of the plurality of plenums having uniform dimensions throughout, the plurality of plenums being disjoint from each other and configured to respectively supply a first metal precursor, a second metal precursor, and a reactant via the respective plenums without intermixing the first metal precursor, the second metal precursor, and the reactant in the plurality of plenums; and
a plurality of through holes positioned in the plurality of plenums, the through holes of the respective plenums being arranged in a radial direction, the radial direction being perpendicular to the axial direction, in the same sequential order as the sequential order of the plenums; the through holes of the plenums opening along a flat surface at a bottom of the showerhead, the flat surface extending radially fully across the bottom of the showerhead.
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