	US 12,331,394 B2
	Method of forming porous inorganic films via polymer swelling infiltration
Diana Berman, Dallas, TX (US); Elena V. Shevchenko, Chicago, IL (US); and Supratik Guha, Chicago, IL (US)
Assigned to UNIVERSITY OF NORTH TEXAS, Dallas, TX (US)
Filed by UNIVERSITY OF NORTH TEXAS, Dallas, TX (US); UCHICAGO ARGONNE, LLC, Chicago, IL (US); and THE UNIVERSITY OF CHICAGO, Chicago, IL (US)
Filed on Jul. 22, 2023, as Appl. No. 18/357,114.
Claims priority of provisional application 63/391,614, filed on Jul. 22, 2022.
Prior Publication US 2024/0026528 A1, Jan. 25, 2024
Int. Cl. C23C 16/04 (2006.01); C23C 16/01 (2006.01); C23C 16/06 (2006.01)

CPC C23C 16/045 (2013.01) [C23C 16/01 (2013.01); C23C 16/06 (2013.01)]

15 Claims

1. A method of forming an inorganic film on a surface, the method comprising:

depositing a polymer at a layer on the surface;

swelling the polymer with a solvent to produce a swollen polymer template on the surface;

infiltrating the swollen polymer template with a liquid phase precursor;

removing the swollen polymer template after infiltrating the swollen polymer template with the liquid phase precursor; and

forming a porous inorganic film on the surface based on removing the swollen polymer template; and

forming a sensor from the porous inorganic film on the surface.