US 12,331,389 B2
Self-lubricating film over wide temperature ranges in vacuum and preparation method and use thereof
Xiaohong Liu, Lanzhou (CN); Hongxuan Li, Lanzhou (CN); Ru Wang, Lanzhou (CN); Li Ji, Lanzhou (CN); Huidi Zhou, Lanzhou (CN); and Jianmin Chen, Lanzhou (CN)
Assigned to Lanzhou Institute of Chemical Physics, CAS, Lanzhou (CN)
Filed by Lanzhou Institute of Chemical Physics, CAS, Lanzhou (CN)
Filed on Nov. 10, 2022, as Appl. No. 18/054,214.
Claims priority of application No. 202111393729.6 (CN), filed on Nov. 23, 2021.
Prior Publication US 2023/0160052 A1, May 25, 2023
Int. Cl. C23C 14/02 (2006.01); C23C 14/06 (2006.01); C23C 14/14 (2006.01); C23C 14/34 (2006.01); C23C 14/35 (2006.01)
CPC C23C 14/025 (2013.01) [C23C 14/021 (2013.01); C23C 14/0623 (2013.01); C23C 14/067 (2013.01); C23C 14/14 (2013.01); C23C 14/3464 (2013.01); C23C 14/35 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A self-lubricating film over wide temperature ranges in vacuum, comprising: a bonding layer, a transition layer and a lubricating layer laminated in sequence,
wherein the bonding layer has a chemical composition of Ti; the transition layer has a chemical composition of Ti and TiB2; the lubricating layer has a chemical composition of Ti, TiB2 and MoS2; and
wherein in the transition layer, a molar ratio of Ti to TiB2 is within a range of 1:(1-2).