US 12,330,948 B2
SiC volumetric shapes and methods of forming boules
Douglas M Dukes, Troy, NY (US); Glenn Sandgren, Ambler, PA (US); Andrew R Hopkins, Houston, TX (US); Isabel Burlingham, Troy, NY (US); and Mark S Land, Houston, TX (US)
Assigned to Pallidus, Inc., Albany, NY (US)
Filed by Pallidus, Inc., Houston, TX (US)
Filed on Mar. 29, 2018, as Appl. No. 15/939,423.
Application 15/939,423 is a continuation of application No. PCT/US2018/024978, filed on Mar. 28, 2018.
Claims priority of provisional application 62/545,367, filed on Aug. 14, 2017.
Claims priority of provisional application 62/478,383, filed on Mar. 29, 2017.
Prior Publication US 2018/0290893 A1, Oct. 11, 2018
Int. Cl. C30B 23/02 (2006.01); C01B 32/963 (2017.01); C30B 23/00 (2006.01); C30B 25/16 (2006.01); C30B 29/36 (2006.01); C30B 29/66 (2006.01)
CPC C01B 32/963 (2017.08) [C30B 23/005 (2013.01); C30B 23/02 (2013.01); C30B 25/165 (2013.01); C30B 29/36 (2013.01); C30B 29/66 (2013.01); C01P 2004/30 (2013.01); C01P 2004/61 (2013.01); C01P 2004/62 (2013.01); C01P 2006/10 (2013.01); C01P 2006/40 (2013.01); C01P 2006/80 (2013.01)] 57 Claims
OG exemplary drawing
 
1. A source material for use as a starting material in a vapor deposition process to grow an SiC boule, the source material defining a volumetric shape of SiC, the volumetric shape comprising:
a. about 100 g to about 12,000 g of SiC granules, having a particle size of from about 0.1 μm to about 100 μm,
b. the SiC granules defining a volumetric shape having a structural integrity;
c. a binder, wherein the binder binds the SiC granules, whereby the volumetric shape is capable of maintaining the structural integrity when placed in a vapor deposition apparatus during a growth cycle of a boule;
d. the volumetric shape defining a void; and,
e. the volumetric shape having pores defining a porosity, wherein the volumetric shape has an apparent density of less than 3.0 g/cc.