US 12,330,933 B2
Cantilever structure with intermediate substrate connection having a film with on anchor with protrusion
Jye Ren, Taipei (TW); Jemm Yue Liang, Sunnyvale, CA (US); and Wen-Chien Chen, New Taipei (TW)
Assigned to xMEMS Labs, Inc., Santa Clara, CA (US)
Filed by xMEMS Labs, Inc., Santa Clara, CA (US)
Filed on Sep. 28, 2023, as Appl. No. 18/476,343.
Claims priority of provisional application 63/433,763, filed on Dec. 20, 2022.
Prior Publication US 2024/0199410 A1, Jun. 20, 2024
Int. Cl. B81B 3/00 (2006.01)
CPC B81B 3/0097 (2013.01) [B81B 2203/0118 (2013.01); B81B 2203/0307 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A cantilever structure, comprising:
an anchor portion; and
a film structure;
wherein the film structure covers over a cavity and vibrates within the cavity;
wherein a length of the film structure is less than a width of the film structure;
wherein the anchor portion comprises at least one protrusion protruding toward the cavity in a top view and in a cross-sectional view, and the film structure is anchored on the anchor portion with the at least one protrusion;
wherein the anchor portion comprises a blocky part, the at least one protrusion protrudes from the blocky part toward the cavity, and the film structure is directly connected to the blocky part and the at least one protrusion in the top view.