US 12,330,932 B2
MEMS microphone
Zhuanzhuan Zhao, Shenzhen (CN); Zhengyu Shi, Shenzhen (CN); Kaijie Wang, Shenzhen (CN); Linlin Wang, Shenzhen (CN); and Rui Zhang, Shenzhen (CN)
Assigned to AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD., Shenzhen (CN)
Appl. No. 17/923,607
Filed by AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD., Shenzhen (CN)
PCT Filed Jun. 7, 2022, PCT No. PCT/CN2022/097266
§ 371(c)(1), (2) Date Nov. 7, 2022,
PCT Pub. No. WO2023/206721, PCT Pub. Date Nov. 2, 2023.
Claims priority of application No. 202220983244.6 (CN), filed on Apr. 25, 2022.
Prior Publication US 2025/0042722 A1, Feb. 6, 2025
Int. Cl. B81B 3/00 (2006.01); H04R 7/18 (2006.01); H04R 19/04 (2006.01)
CPC B81B 3/0072 (2013.01) [H04R 7/18 (2013.01); H04R 19/04 (2013.01); B81B 2201/0257 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/0315 (2013.01); B81B 2203/0353 (2013.01); H04R 2201/003 (2013.01); H04R 2410/03 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A Micro-Electro-Mechanical System (MEMS) microphone, comprising:
a substrate comprising a back cavity;
a capacitive system arranged on the substrate, comprising a back plate and a diaphragm opposite to the back plate, the diaphragm located on a side of the back plate close to the substrate;
a support member located between the diaphragm and the back plate; and
a blocking portion with a continuous annular structure arranged on a side of the back plate facing the diaphragm; wherein
the diaphragm comprises a vibration portion and a fixing portion surrounding the vibration portion and fixed to the substrate, the vibration portion and the fixing portion are spaced apart from each other by a slit, the vibration portion and the back plate are fixedly connected by the support member, a projection of the blocking portion along a vibration direction of the diaphragm is located within the vibration portion of the diaphragm, the back plate comprises a body portion with sound holes and an edge portion surrounding an outer periphery of the body portion, and the blocking portion is located at the edge portion of the back plate,
when no voltage is applied, the diaphragm is not in contact with the blocking portion of the back plate; after the voltage is applied, the diaphragm and the blocking portion of the back plate are attached together.