US 12,330,261 B2
Offset pore poromeric polishing pad
Wei-Wen Tsai, Philadelphia, PA (US); Katsumasa Kawabata, Kyoto (JP); Hui Bin Huang, Monroeville, NJ (US); Akane Uehara, Kyoto (JP); and Yosuke Takei, Shimane (JP)
Assigned to Rohm and Haas Electronic Materials CMP Holdings, Inc., Newark, DE (US)
Filed by Rohm and Haas Electronic Materials CMP Holdings, Inc., Newark, DE (US)
Filed on Apr. 18, 2020, as Appl. No. 16/852,422.
Prior Publication US 2021/0323116 A1, Oct. 21, 2021
Int. Cl. B24B 37/26 (2012.01); B24B 37/20 (2012.01); B24B 37/24 (2012.01); B24D 3/32 (2006.01); B24D 11/00 (2006.01)
CPC B24B 37/26 (2013.01) [B24B 37/20 (2013.01); B24B 37/24 (2013.01); B24D 3/32 (2013.01); B24D 11/00 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A porous polyurethane polishing pad comprising:
a porous matrix having large pores extending upward from a base surface and open to an upper surface, the large pores being interconnected with tertiary pores, a portion of the large pores being open to a top polishing surface, at least a portion of the large pores extending to the top polishing surface having lower and upper sections with a vertical orientation, vertical being an orthogonal direction from the base surface up to the polishing surface and middle sections having a spring-arm shape connecting the lower and upper sections, the lower section having a tear drop shape and a vertical bisect, the upper section having a cylindrical shape and a vertical bisect, wherein the middle section extends from the vertical bisect of the lower section to the vertical bisect of the upper section, middle sections have an angle between 15 and 90 degrees as measured from an upward vertical direction, the middle sections have an average diameter less than an average diameter of the lower section of the large pores and greater than an average diameter of the upper section of the large pores, the lower and upper sections being offset in a horizontal direction, the offset resulting in the middle section extending beyond the lower section,
middle-sized pores with a columnar shape and a vertical orientation originating adjacent the middle sections and small pores with a columnar shape and a vertical orientation originating between the middle-sized pores, wherein the large pores having horizontal offset upper and lower sections, middle-sized pores, and small pores combine for increasing compressibility of the polishing pad and contact area of the top polishing surface during polishing, wherein the polishing pad has a compressibility of at least 5% as measured with a 5 mm diameter probe against a flat sample by adding a 60.5 gram sample, waiting sixty seconds, then measuring thickness 1 (T1), then after waiting an additional sixty seconds adding an additional 98 grams for a total of 158.5 grams measuring thickness after waiting an additional sixty seconds (T2) and wherein Compressibility (%)=(T1−T2)/T1.