US 12,330,251 B2
Holding unit
Takayuki Masada, Tokyo (JP); Tomohito Matsuda, Tokyo (JP); Yuhei Fujii, Tokyo (JP); and Naoya Takesue, Tokyo (JP)
Assigned to DISCO CORPORATION, Tokyo (JP)
Filed by DISCO CORPORATION, Tokyo (JP)
Filed on Apr. 12, 2023, as Appl. No. 18/299,327.
Claims priority of application No. 2022-069207 (JP), filed on Apr. 20, 2022.
Prior Publication US 2023/0339055 A1, Oct. 26, 2023
Int. Cl. B23Q 1/56 (2006.01); H01L 21/687 (2006.01)
CPC B23Q 1/56 (2013.01) [H01L 21/68721 (2013.01); H01L 21/68728 (2013.01); H01L 21/68785 (2013.01)] 2 Claims
OG exemplary drawing
 
1. A holding unit that holds a target object by a holding surface of a holding table, the holding unit comprising:
a base having a first and second side surface and a slot formed through the first and second side surfaces;
a fixing mechanism spaced away from the first side surface of the base that fixes the target object to the holding surface of the holding table, the fixing mechanism including:
a fastening member configured to fix and release the target object to the holding surface, wherein the fastening member has a biasing member that biases the fastening member toward a fixing position, wherein at the fixing position the fastening member fastens the target object and fixes the target object to the holding surface;
a movement mechanism mounted to the second side surface of the base that moves the fixing mechanism toward a release position at which the fastening member releases the target object, the movement mechanism including:
a pressing member that extends through the slot from the first side surface to the second side surface of the base and presses the fastening member, and
an actuator that moves the pressing member in a linear direction parallel to the first side surface of the base to position the fastening member into the release position; and
a controller, wherein the controller determines whether the biasing member is biasing the fastening member in the fixing position or in the release position, wherein a detected pressing force of the pressing member is based on the pressure of a fluid applied to the actuator, the pressing force being applied when the fastening member is moved from the fixing position to the release position.