| CPC B08B 3/022 (2013.01) [B08B 9/0821 (2013.01); F26B 25/14 (2013.01); G03F 7/70925 (2013.01); H01L 21/67703 (2013.01); B08B 2230/01 (2013.01); F26B 3/04 (2013.01); F26B 3/30 (2013.01)] | 14 Claims |
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1. A POD cleaning apparatus comprising:
a separation unit separating a POD that is introduced through an introducing inlet;
a first transportation unit transporting a separation POD resulting from the separation in the separation unit;
a plurality of cleaning chambers in each of which the separation POD transported by the first transportation unit is cleaned and dried;
a vacuum chamber in which the separation POD dried in the cleaning chamber is vacuum-processed;
a second transportation unit transporting the separation POD dried in the cleaning chamber to the vacuum chamber; and
an assembly unit assembling the vacuum-processed separation PODs,
wherein each of the plurality of cleaning chambers comprises:
a cleaning sub-chamber where the separation POD transported by the first transportation unit is accommodated and cleaned;
a drying chamber where the separation POD transported from the cleaning sub-chamber is dried,
wherein the cleaning sub-chamber and the drying chamber are spatially separated; and
a chamber moving mechanism moving within the cleaning sub-chamber and the drying chamber, comprising:
a jig on which the separation POD is stably mounted, and a moving unit coupled to the jig to move the jig,
wherein the moving unit is arranged outside the cleaning sub-chamber and the drying chamber,
wherein the jig comprises a holding jig for supporting the separation POD and a coupling jig for connecting the holding jig to the moving unit,
wherein the holding jig comprises:
a first portion coupled to the coupling jig to extend therefrom vertically downward at a right angle,
a second portion extending from an end of the first portion at an inclination and configured to have the separation POD seated thereon as stably arriving thereat, wherein the second portion is formed to have a rectangular cross-section having a greater size than an external edge of the separation POD, and wherein the second portion is exposed to both lateral sides of the separation POD as stably arriving thereat, and
a plurality of support pins provided to be coupled to the second portion, arranged on a lower portion of the second portion to support a lower portion of the separation POD, and arranged on side surfaces of the second portion to support both side surfaces of the separation POD and a rear surface thereof.
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